A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range
نویسندگان
چکیده
منابع مشابه
A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range
A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified...
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ژورنال
عنوان ژورنال: Sensors
سال: 2016
ISSN: 1424-8220
DOI: 10.3390/s16101611